@article{b5b5f8c6bc6f49fab32ddc477143b5b5,
title = "Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications",
author = "J. Verd and A. Uranga and J. Teva and J.L. L{\'o}pez and F. Torres and J. Esteve and G. Abadal and Barniol, {F. P{\'e}rez-Murano N.}",
year = "2006",
month = jan,
day = "1",
language = "English",
volume = "6",
pages = "495--497",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
}