Initial leakage current related to extrinsic breakdown in HfO2/Al2O3 nanolaminate ALD dielectrics

C. Martínez-Domingo, X. Saura, A. Conde, D. Jiménez, E. Miranda, J.M. Rafí, F. Campabadal, J. Suñé

Research output: Contribution to journalArticleResearch

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1380-1383
JournalMicroelectronic Engineering
Issue number7
Publication statusPublished - 1 Jan 2011

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