Infrared investigation of implantation damage in 6H-SiC

J. Camassel, H.Y. Wang, J. Pernot, P. Godignon, N. Mestres, J. Pascual

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)859-862
JournalMat. sci. forum
Volume389
Issue number3
Publication statusPublished - 1 Jan 2002

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