Original language | English |
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Pages (from-to) | 1445-1449 |
Journal | Journal of Vacuum Science & Technology. B, |
Volume | 26 |
Issue number | 4 |
Publication status | Published - 1 Jan 2008 |
Influence of Vacuum Environment on Conductive AFM measurements of advanced MOS Gate dielectrics
L. Aguilera, W. Polspoel, A. Volodin, C. Van Haesendonck, M. Porti, W. Vandervorst, M. Nafria, X. Aymerich
Research output: Contribution to journal › Article › Research
7
Citations
(Scopus)