TY - JOUR
T1 - In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry
AU - Kreuzer, Martin
AU - Whitworth, Guy L.
AU - Francone, Achille
AU - Gomis-Bresco, Jordi
AU - Kehagias, Nikolaos
AU - Sotomayor-Torres, Clivia M.
PY - 2018/5/1
Y1 - 2018/5/1
N2 - © 2018 Author(s). We describe and discuss the optical design of a diffractometer to carry out in-line quality control during roll-to-roll nanoimprinting. The tool measures diffractograms in reflection geometry, through an aspheric lens to gain fast, non-invasive information of any changes to the critical dimensions of target grating structures. A stepwise tapered linear grating with constant period was fabricated in order to detect the variation in grating linewidth through diffractometry. The minimum feature change detected was ∼40 nm to a precision of 10 nm. The diffractometer was then integrated with a roll-to-roll UV assisted nanoimprint lithography machine to gain dynamic measurements in situ.
AB - © 2018 Author(s). We describe and discuss the optical design of a diffractometer to carry out in-line quality control during roll-to-roll nanoimprinting. The tool measures diffractograms in reflection geometry, through an aspheric lens to gain fast, non-invasive information of any changes to the critical dimensions of target grating structures. A stepwise tapered linear grating with constant period was fabricated in order to detect the variation in grating linewidth through diffractometry. The minimum feature change detected was ∼40 nm to a precision of 10 nm. The diffractometer was then integrated with a roll-to-roll UV assisted nanoimprint lithography machine to gain dynamic measurements in situ.
UR - https://ddd.uab.cat/record/204863
U2 - https://doi.org/10.1063/1.5011740
DO - https://doi.org/10.1063/1.5011740
M3 - Article
VL - 6
IS - 5
M1 - 058502
ER -