© 2018 Author(s). We describe and discuss the optical design of a diffractometer to carry out in-line quality control during roll-to-roll nanoimprinting. The tool measures diffractograms in reflection geometry, through an aspheric lens to gain fast, non-invasive information of any changes to the critical dimensions of target grating structures. A stepwise tapered linear grating with constant period was fabricated in order to detect the variation in grating linewidth through diffractometry. The minimum feature change detected was ∼40 nm to a precision of 10 nm. The diffractometer was then integrated with a roll-to-roll UV assisted nanoimprint lithography machine to gain dynamic measurements in situ.
|Publication status||Published - 1 May 2018|
Kreuzer, M., Whitworth, G. L., Francone, A., Gomis-Bresco, J., Kehagias, N., & Sotomayor-Torres, C. M. (2018). In-line metrology for roll-to-roll UV assisted nanoimprint lithography using diffractometry. APL Materials, 6(5), . https://doi.org/10.1063/1.5011740