Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter

L. Aguilera, M. Lanza, M. Porti, J. Grifoll, M. Nafría, X. Aymerich

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)

Abstract

A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a log I-V amplifier. This substitution extends the current dynamic range from 1-100 pA to 1 pA-1 mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in Si O2 layers. © 2008 American Institute of Physics.
Original languageEnglish
Article number073701
JournalReview of Scientific Instruments
Volume79
Issue number7
DOIs
Publication statusPublished - 15 Aug 2008

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