Improvement of the Porous Silicon Sacrificial-Layer Etching for Micromachining Applications

J.M. López-Villegas, M. Navarro, J. Samitier, J. Bausells, J.R. Morante

    Research output: Contribution to journalArticleResearch

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)676-679
    JournalSens. actuators, A, Phys.
    Volume62
    Issue number1-3
    Publication statusPublished - 1 Jan 1997

    Cite this