Implanted and irradiated SiO2/Si structures electrical properties at the nanoscale

M. Porti, M. Nafría, S. Gerardin, X. Aymerich, A. Cester, A. Paccagnella, G. Ghidini

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	421-425
Journal	Journal of vacuum science & technology. B
Volume	27
Issue number	1
Publication status	Published - 1 Jan 2009

Cite this

@article{50367028fe4142e28f30ce950e557a97,

title = "Implanted and irradiated SiO2/Si structures electrical properties at the nanoscale",

author = "M. Porti and M. Nafr{\'i}a and S. Gerardin and X. Aymerich and A. Cester and A. Paccagnella and G. Ghidini",

year = "2009",

month = jan,

day = "1",

language = "English",

volume = "27",

pages = "421--425",

number = "1",

}