Implanted and irradiated SiO2/Si structures electrical properties at the nanoscale

M. Porti, M. Nafría, S. Gerardin, X. Aymerich, A. Cester, A. Paccagnella, G. Ghidini

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)421-425
JournalJournal of vacuum science & technology. B
Volume27
Issue number1
Publication statusPublished - 1 Jan 2009

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