Original language | English |
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Pages (from-to) | 421-425 |
Journal | Journal of vacuum science & technology. B |
Volume | 27 |
Issue number | 1 |
Publication status | Published - 1 Jan 2009 |
Implanted and irradiated SiO2/Si structures electrical properties at the nanoscale
M. Porti, M. Nafría, S. Gerardin, X. Aymerich, A. Cester, A. Paccagnella, G. Ghidini
Research output: Contribution to journal › Article › Research