Impact of the precursor chemistry and process conditions on the cell-to-cell variability in 1T-1R based HfO<inf>2</inf> RRAM devices

Alessandro Grossi, Eduardo Perez, Cristian Zambelli, Piero Olivo, Enrique Miranda, Robin Roelofs, Jacob Woodruff, Petri Raisanen, Wei Li, Michael Givens, Ioan Costina, Markus Andreas Schubert, Christian Wenger

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12 Citations (Scopus)

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Medicine & Life Sciences