Imaging breakdown spots in SiO<inf>2</inf> films and MOS devices with a conductive atomic force microscope

    Research output: Contribution to journalArticleResearchpeer-review

    20 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Imaging breakdown spots in SiO<inf>2</inf> films and MOS devices with a conductive atomic force microscope'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemistry