Identifying the nature of surface chemical modification for directed self-assembly of block copolymers

Laura Evangelio, Federico Gramazio, Matteo Lorenzoni, Michaela Gorgoi, Francisco Miguel Espinosa, Ricardo García, Francesc Pérez-Murano, Jordi Fraxedas

    Research output: Contribution to journalArticleResearchpeer-review

    3 Citations (Scopus)

    Abstract

    © 2017 Evangelio et al. In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemicalepitaxy- directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key role on the final ordering. Here, we focus on the experimental characterization of the chemical interactions that occur at the interface built between different chemical guiding patterns and the domains of the block copolymers. We have chosen hard X-ray high kinetic energy photoelectron spectroscopy as an exploration technique because it provides information on the electronic structure of buried interfaces. The outcome of the characterization sheds light onto key aspects of directed self-assembly: grafted brush layer, chemical pattern creation and brush/block co-polymer interface.
    Original languageEnglish
    Article number198
    JournalBeilstein Journal of Nanotechnology
    Volume8
    Issue number1
    DOIs
    Publication statusPublished - 1 Jan 2017

    Keywords

    • Block copolymer
    • Chemical guiding pattern
    • Directed self-assembly
    • Thin film
    • X-ray photoemission spectroscopy

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