Homogeneity of nitrogen and phosphorus Co-implants in 4H-SiC: Full wafer scale investigation

S. Blanqué, J. Lyonnet, J. Camassel, R. Pérez, P. Terziyska, S. Contreras, PHilippe Raymond Maria Godignon, Narcís Mestres Andreu, J. Pascual

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)645-648
JournalMaterials Science Forum
Volume483-485
Publication statusPublished - 1 Jan 2005

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