High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

J. Verd, G. Abadal, J. Teva, A. Uranga, N. Barniol, J. Esteve, M. Duch, F. Pérez-Murano

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publicationIEEE international symposium on circuits and systems, ISCAS 2005
    Place of PublicationKobe (JP)
    Pages4209-4212
    Number of pages3
    Edition1
    Publication statusPublished - 1 Jan 2005

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