High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

J. Verd, G. Abadal, J. Teva, A. Uranga, N. Barniol, J. Esteve, M. Duch, F. Pérez-Murano

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	IEEE international symposium on circuits and systems, ISCAS 2005
Place of Publication	Kobe (JP)
Pages	4209-4212
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2005

Cite this

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title = "High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors",

author = "J. Verd and G. Abadal and J. Teva and A. Uranga and N. Barniol and J. Esteve and M. Duch and F. P{\'e}rez-Murano",

year = "2005",

month = jan,

day = "1",

language = "English",

isbn = "978-0-7803-8834-5",

pages = "4209--4212",

booktitle = "IEEE international symposium on circuits and systems, ISCAS 2005",

edition = "1",

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TY - CHAP

T1 - High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

AU - Verd, J.

AU - Abadal, G.

AU - Teva, J.

AU - Uranga, A.

AU - Barniol, N.

AU - Esteve, J.

AU - Duch, M.

AU - Pérez-Murano, F.

PY - 2005/1/1

Y1 - 2005/1/1

M3 - Chapter

SN - 978-0-7803-8834-5

SP - 4209

EP - 4212

BT - IEEE international symposium on circuits and systems, ISCAS 2005

CY - Kobe (JP)

ER -