High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

J. Verd, G. Abadal, J . Teva, A. Uranga, N. Barniol, J. Esteve, M. Duch, F. Pérez-Murano

Research output: Contribution to journalArticleResearch

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)4209-4212
JournalProceedings - IEEE International Symposium on Circuits and Systems
Issue number1465559
Publication statusPublished - 1 Jan 2005

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