Original language | English |
---|---|
Title of host publication | The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09 |
Place of Publication | Denver (US) |
Pages | 557-560 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2009 |
High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter
J.Ll López, J. Verd, J. Giner, A. Uranga, G. Murillo, E. Marigo, F. Torres, G. Abadal, N. Barniol
Research output: Chapter in Book › Chapter › Research