High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter

J.Ll López, J. Verd, J. Giner, A. Uranga, G. Murillo, E. Marigo, F. Torres, G. Abadal, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationThe 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09
Place of PublicationDenver (US)
Number of pages3
Publication statusPublished - 1 Jan 2009

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