High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter

J.Ll López, J. Verd, J. Giner, A. Uranga, G. Murillo, E. Marigo, F. Torres, G. Abadal, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09
Place of Publication	Denver (US)
Pages	557-560
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2009

Cite this

@inbook{53b8c67ef0cc49bc86dbf1f8daf5d15e,

title = "High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter",

author = "J.Ll L{\'o}pez and J. Verd and J. Giner and A. Uranga and G. Murillo and E. Marigo and F. Torres and G. Abadal and N. Barniol",

year = "2009",

month = jan,

day = "1",

language = "English",

isbn = "978-1-4244-4193-8",

pages = "557--560",

booktitle = "The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09",

edition = "1",

}

The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09. 1. ed. Denver (US), 2009. p. 557-560.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter

AU - López, J.Ll

AU - Verd, J.

AU - Giner, J.

AU - Uranga, A.

AU - Murillo, G.

AU - Marigo, E.

AU - Torres, F.

AU - Abadal, G.

AU - Barniol, N.

PY - 2009/1/1

Y1 - 2009/1/1

M3 - Chapter

SN - 978-1-4244-4193-8

SP - 557

EP - 560

BT - The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09

CY - Denver (US)

ER -