High Performance See Saw Torsional CMOS-MEMS Relay using Tungsten VIA Layer

M. Riverola, F. Torres, A. Uranga, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)579-592
JournalMicromachines
Volume9
Publication statusPublished - 1 Jan 2018

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