High Performance See Saw Torsional CMOS-MEMS Relay using Tungsten VIA Layer

M. Riverola, F. Torres, A. Uranga, N. Barniol

Research output: Contribution to journal › Article › Research

Cite this

@article{1649e50549fd4899b1c97980110398f3,

title = "High Performance See Saw Torsional CMOS-MEMS Relay using Tungsten VIA Layer",

author = "M. Riverola and F. Torres and A. Uranga and N. Barniol",

year = "2018",

month = jan,

day = "1",

language = "English",

volume = "9",

pages = "579--592",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

}