High level communication interface design for integrated MEMS and microinstrument bus

M. Rodríguez, E. Magdaleno, C. Ferrer, B. Lorente, A. Ayala

    Research output: Contribution to journalArticleResearch

    4 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)107-115
    JournalProceedings of SPIE, The international Society for Optical Engineering
    Volume5836
    Issue number12
    DOIs
    Publication statusPublished - 1 Jan 2005

    Cite this

    Rodríguez, M., Magdaleno, E., Ferrer, C., Lorente, B., & Ayala, A. (2005). High level communication interface design for integrated MEMS and microinstrument bus. Proceedings of SPIE, The international Society for Optical Engineering, 5836(12), 107-115. https://doi.org/10.1117/12.608642