Original language | English |
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Title of host publication | Defects in HIgh-k Gate Dielectric Stacks: Nano-Electronic Semiconductor Devices (NATO Science Series II: Mathematics, Physics and Chemistry) |
Place of Publication | Berlín (DE) |
Pages | 435-446 |
Number of pages | 11 |
Edition | 1 |
Publication status | Published - 1 Jan 2006 |
High-k gate stacks electrical characterization at the nanoscale using conductive-AFM
M. Nafría, M. Porti, X. Blasco, L. Aguilera, X. Aymerich
Research output: Chapter in Book › Chapter › Research