High focal depth imaging of small structures

Rosemarie Hild; María J. Yzuel; Juan C. Escalera

doi:10.1016/S0167-9317(96)00078-0

High focal depth imaging of small structures

Rosemarie Hild, María J. Yzuel, Juan C. Escalera

Research output: Contribution to journal › Article › Research › peer-review

20 Citations (Scopus)

Abstract

The image intensity of small structures is considered under the influence of nonuniform pupils, which are apodizing and/or hyperresolving in the radial or axial direction. The predicted features of the aerial images of these structures are explained with the discussion of the 3D response functions and of the apparent transfer function. Differences occur between small lines and squares. In contrast to the 3D point response the 3D response function of the line is influenced by the coherence parameter.

Original language	English
Pages (from-to)	195-214
Journal	Microelectronic Engineering
Volume	34
Issue number	2
DOIs	https://doi.org/10.1016/S0167-9317(96)00078-0
Publication status	Published - 1 Jan 1997

Keywords

Axial/lateral apodizing and hyperresolving filters
Imaging of small structures
Nonuniform pupils
Optical lithography

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abstract = "The image intensity of small structures is considered under the influence of nonuniform pupils, which are apodizing and/or hyperresolving in the radial or axial direction. The predicted features of the aerial images of these structures are explained with the discussion of the 3D response functions and of the apparent transfer function. Differences occur between small lines and squares. In contrast to the 3D point response the 3D response function of the line is influenced by the coherence parameter.",

keywords = "Axial/lateral apodizing and hyperresolving filters, Imaging of small structures, Nonuniform pupils, Optical lithography",

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KW - Optical lithography

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