High focal depth imaging of small structures

Rosemarie Hild, María J. Yzuel, Juan C. Escalera

Research output: Contribution to journalArticleResearchpeer-review

20 Citations (Scopus)

Abstract

The image intensity of small structures is considered under the influence of nonuniform pupils, which are apodizing and/or hyperresolving in the radial or axial direction. The predicted features of the aerial images of these structures are explained with the discussion of the 3D response functions and of the apparent transfer function. Differences occur between small lines and squares. In contrast to the 3D point response the 3D response function of the line is influenced by the coherence parameter.
Original languageEnglish
Pages (from-to)195-214
JournalMicroelectronic Engineering
Volume34
Issue number2
DOIs
Publication statusPublished - 1 Jan 1997

Keywords

  • Axial/lateral apodizing and hyperresolving filters
  • Imaging of small structures
  • Nonuniform pupils
  • Optical lithography

Fingerprint Dive into the research topics of 'High focal depth imaging of small structures'. Together they form a unique fingerprint.

Cite this