High Focal Depth Imaging by Beam Shaping Optical Elements?

R Hild, J.C. Escalera, M. J. Yzuel, G. Nitzsche

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)205-208
JournalMicroelectronic Engineering
Volume35
Issue number1-4
DOIs
Publication statusPublished - 1 Feb 1997

Cite this