Abstract
© 2016 Author(s). The integration of epitaxial BaTiO 3 films on silicon, combining c-orientation, surface flatness, and high ferroelectric polarization is of main interest towards its use in memory devices. This combination of properties has been only achieved so far by using yttria-stabilized zirconia buffer layers. Here, the all-perovskite BaTiO 3 /LaNiO 3 /SrTiO 3 heterostructure is grown monolithically on Si(001). The BaTiO 3 films are epitaxial and c-oriented and present low surface roughness and high remnant ferroelectric polarization around 6 μC/cm 2 . This result paves the way towards the fabrication of lead-free BaTiO 3 ferroelectric memories on silicon platforms.
Original language | English |
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Article number | 122903 |
Journal | Applied Physics Letters |
Volume | 109 |
Issue number | 12 |
DOIs | |
Publication status | Published - 19 Sept 2016 |