Growth, reliability and electrical characterization of thin dielectrics in MOS devices at a nanometer scale with C-AFM

M. Porti, X. Blasco, M. Nafría, X. Aymerich, A. Mendez-Vilas (Editor), L. Labajos-Broncano (Editor)

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationCurrent Issues on Multidisciplinary Microscopy Research and Education
Place of PublicationBadajoz (ES)
Pages257-264
Number of pages7
Edition1
Publication statusPublished - 1 Jan 2004

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