Growth and stress characterization of LPCVD SiC films deposited on bare, carbonized Si(001) substrates

E. Hurtós, J. Rodríguez-Viejo, K. Zekentes, M.T. Clavaguera-Mora

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)173-178
JournalMater. Res. Soc. symp. proc.
Volume555
Publication statusPublished - 1 Jan 1999

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Hurtós, E., Rodríguez-Viejo, J., Zekentes, K., & Clavaguera-Mora, M. T. (1999). Growth and stress characterization of LPCVD SiC films deposited on bare, carbonized Si(001) substrates. Mater. Res. Soc. symp. proc., 555, 173-178.