Growth and characterization of LPCVD SiC grown on SiO2Si(100) substrates

J. Rodriguez, N. Clavaguera, M.T. Clavaguera, G. Arnaud, J. Camassel, J. Pascual, S. Berberich, J. Millan

Research output: Contribution to journalArticleResearchpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)98-98
JournalMater. sci. technol.
Volume12
Issue number0
Publication statusPublished - 1 Jan 1996

Cite this

Rodriguez, J., Clavaguera, N., Clavaguera, M. T., Arnaud, G., Camassel, J., Pascual, J., Berberich, S., & Millan, J. (1996). Growth and characterization of LPCVD SiC grown on SiO2Si(100) substrates. Mater. sci. technol., 12(0), 98-98.