Grain boundary mediated leakage current in polycrystalline HfO2 films

K. P. McKenna, A. Shluger, V. Iglesias, M. Porti, M. Nafria, M. Lanza, G. Bersuker

Research output: Contribution to journalArticleResearch

75 Citations (Scopus)
Original languageEnglish
Pages (from-to)1272-1275
JournalMicroelectronic Engineering
Volume88
DOIs
Publication statusPublished - 1 Jan 2011

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