Grain boundary driven leakage path formation in HfO2 dielectrics

G. Bersuker; J. Yuma; L. Vandelli; A. Padovani; L. Larcher; V. Iglesias; M. Porti; M. Nafria; K. P. McKenna; A. Shluger; P. Kirsch; R. Jammy

Grain boundary driven leakage path formation in HfO2 dielectrics

G. Bersuker, J. Yuma, L. Vandelli, A. Padovani, L. Larcher, V. Iglesias, M. Porti, M. Nafria, K. P. McKenna, A. Shluger, P. Kirsch, R. Jammy

Research output: Contribution to journal › Article › Research

87 Citations (Scopus)

Original language	English
Pages (from-to)	146-150
Journal	Solid-State Electronics
Volume	66
Publication status	Published - 1 Jan 2011

Cite this

@article{cfd3e054056d4fe18af05517d5436d1c,

title = "Grain boundary driven leakage path formation in HfO2 dielectrics",

author = "G. Bersuker and J. Yuma and L. Vandelli and A. Padovani and L. Larcher and V. Iglesias and M. Porti and M. Nafria and McKenna, {K. P.} and A. Shluger and P. Kirsch and R. Jammy",

year = "2011",

month = jan,

day = "1",

language = "English",

volume = "66",

pages = "146--150",

journal = "Solid-State Electronics",

issn = "0038-1101",

publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Grain boundary driven leakage path formation in HfO2 dielectrics

AU - Bersuker, G.

AU - Yuma, J.

AU - Vandelli, L.

AU - Padovani, A.

AU - Larcher, L.

AU - Iglesias, V.

AU - Porti, M.

AU - Nafria, M.

AU - McKenna, K. P.

AU - Shluger, A.

AU - Kirsch, P.

AU - Jammy, R.

PY - 2011/1/1

Y1 - 2011/1/1

M3 - Article

VL - 66

SP - 146

EP - 150

JO - Solid-State Electronics

JF - Solid-State Electronics

SN - 0038-1101

ER -