Gas source molecular beam epitaxy of β-SiC on Si substrates

K. Zekentes, N. Bécourt, M. Androulidaki, K. Tsagaraki, J. Stoemenos, J. M. Bluet, J. Camassel, J. Pascual

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19 Citations (Scopus)


The growth of β-SiC films on Si(100) substrates using C 2 H 2 gas and Si solid sources in a molecular beam epitaxy system has been investigated. Different C 2 H 2 and Si fluxes as well as different substrate temperatures have been used. The growth was performed at two steps: the initial optimal carbonisation step followed by the MBE growth with simultaneous supply of Si molecular and C 2 H 2 gas beams. The films were analysed using reflected high-energy electron diffraction, scanning electron microscopy, transmission electron microscopy, atomic force microscopy and Fourier transform infrared spectroscopy. Thin (< 0.1 μm) single crystalline SiC was grown at 980°C while 850°C was sufficient for the carbonisation of the Si surface. Films thicker than 0.1 μm are partially polycrystalline.
Original languageEnglish
Pages (from-to)22-27
JournalApplied Surface Science
Publication statusPublished - 1 Jan 1996


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