Original language | English |
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Title of host publication | 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005 |
Place of Publication | Miami (US) |
Pages | 867-870 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2005 |
Fully integrated nanoresonator system with attogram/Hz mass resolution
E. Forsen, G. Abadal, S.G. Nilssol, J. Verd, R. Sandberg, W. Svendsen, J. Teva, F. Pérez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, A. Boisen
Research output: Chapter in Book › Chapter › Research