Fully integrated nanoresonator system with attogram/Hz mass resolution

E. Forsen; G. Abadal; S.G. Nilssol; J. Verd; R. Sandberg; W. Svendsen; J. Teva; F. Pérez-Murano; J. Esteve; E. Figueras; F. Campabadal; L. Montelius; N. Barniol; A. Boisen

Fully integrated nanoresonator system with attogram/Hz mass resolution

E. Forsen, G. Abadal, S.G. Nilssol, J. Verd, R. Sandberg, W. Svendsen, J. Teva, F. Pérez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, A. Boisen

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005
Place of Publication	Miami (US)
Pages	867-870
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2005

Cite this

Forsen, E., Abadal, G., Nilssol, S. G., Verd, J., Sandberg, R., Svendsen, W., Teva, J., Pérez-Murano, F., Esteve, J., Figueras, E., Campabadal, F., Montelius, L., Barniol, N., & Boisen, A. (2005). Fully integrated nanoresonator system with attogram/Hz mass resolution. In 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005 (1 ed., pp. 867-870).

Forsen, E. ; Abadal, G. ; Nilssol, S.G. ; Verd, J. ; Sandberg, R. ; Svendsen, W. ; Teva, J. ; Pérez-Murano, F. ; Esteve, J. ; Figueras, E. ; Campabadal, F. ; Montelius, L. ; Barniol, N. ; Boisen, A. / Fully integrated nanoresonator system with attogram/Hz mass resolution. 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005. 1. ed. Miami (US), 2005. pp. 867-870

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title = "Fully integrated nanoresonator system with attogram/Hz mass resolution",

author = "E. Forsen and G. Abadal and S.G. Nilssol and J. Verd and R. Sandberg and W. Svendsen and J. Teva and F. P{\'e}rez-Murano and J. Esteve and E. Figueras and F. Campabadal and L. Montelius and N. Barniol and A. Boisen",

year = "2005",

month = jan,

day = "1",

language = "English",

isbn = "978-0-7803-8732-4",

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booktitle = "18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005",

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Forsen, E, Abadal, G, Nilssol, SG, Verd, J, Sandberg, R, Svendsen, W, Teva, J, Pérez-Murano, F, Esteve, J, Figueras, E, Campabadal, F, Montelius, L, Barniol, N & Boisen, A 2005, Fully integrated nanoresonator system with attogram/Hz mass resolution. in 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005. 1 edn, Miami (US), pp. 867-870.

Fully integrated nanoresonator system with attogram/Hz mass resolution. / Forsen, E.; Abadal, G.; Nilssol, S.G.; Verd, J.; Sandberg, R.; Svendsen, W.; Teva, J.; Pérez-Murano, F.; Esteve, J.; Figueras, E.; Campabadal, F.; Montelius, L.; Barniol, N.; Boisen, A.

18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005. 1. ed. Miami (US), 2005. p. 867-870.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Fully integrated nanoresonator system with attogram/Hz mass resolution

AU - Forsen, E.

AU - Abadal, G.

AU - Nilssol, S.G.

AU - Verd, J.

AU - Sandberg, R.

AU - Svendsen, W.

AU - Teva, J.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Montelius, L.

AU - Barniol, N.

AU - Boisen, A.

PY - 2005/1/1

Y1 - 2005/1/1

M3 - Chapter

SN - 978-0-7803-8732-4

SP - 867

EP - 870

BT - 18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005

CY - Miami (US)

ER -