Fully integrated nanoresonator system with attogram/Hz mass resolution

E. Forsen, G. Abadal, S.G. Nilssol, J. Verd, R. Sandberg, W. Svendsen, J. Teva, F. Pérez-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, A. Boisen

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, 30 January - 3 February 2005, MEMS 2005
    Place of PublicationMiami (US)
    Number of pages3
    Publication statusPublished - 1 Jan 2005

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