Fully integrated nanoresonator system with attogram/Hz mass resolution

E. Forsén, G. Abadal, S.G. Nilsson, J. Verd, R. Sandberg, W. Svendsen, J. Teva, F. Peréz-Murano, J. Esteve, E. Figueras, F. Campabadal, L. Montelius, N. Barniol, A. Boisen

Research output: Contribution to journalArticleResearch

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)867-870
JournalProceedings, IEEE micro electro mechanical systems
Publication statusPublished - 1 Jan 2005

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