Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

A. Uranga*, J. Verd, J. L. López, J. Teva, G. Abadal, F. Torres, J. Esteve, F. Pérez-Murano, N. Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

23 Citations (Scopus)

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Engineering & Materials Science