Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

A. Uranga; J. Verd; J. L. López; J. Teva; G. Abadal; F. Torres; J. Esteve; F. Pérez-Murano; N. Barniol

doi:10.1049/el:20070580

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

A. Uranga^*, J. Verd, J. L. López, J. Teva, G. Abadal, F. Torres, J. Esteve, F. Pérez-Murano, N. Barniol

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

23 Citations (Scopus)

Abstract

The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.

Original language	English
Pages (from-to)	452-453
Number of pages	2
Journal	Electronics Letters
Volume	43
Issue number	8
DOIs	https://doi.org/10.1049/el:20070580
Publication status	Published - 2007

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abstract = "The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.",

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AU - Uranga, A.

AU - Verd, J.

AU - López, J. L.

AU - Teva, J.

AU - Abadal, G.

AU - Torres, F.

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2007

Y1 - 2007

N2 - The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.

AB - The design and test of a fully integrated CMOS-MEMS-MIXLER, using a commercial technology (AMS 0.35 μm) is presented. The MEMS structure is basically a clamped-clamped beam resonator implemented with the polysilicon capacitance module of the selected technology, showing a fundamental lateral resonance frequency of 22.5 MHz. Two different approaches based, respectively, on the nonlinearity of the voltage against the excitation force and on the amplitude modulation of the excitation signal, have been proposed in order to operate the MEMS as a MIXLER.

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DO - 10.1049/el:20070580

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AN - SCOPUS:34247209189

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VL - 43

SP - 452

EP - 453

JO - Electronics Letters

JF - Electronics Letters

IS - 8

ER -

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

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