Fully CMOS integrated low voltage 100 MHz MEMS resonator

A. Uranga, J. Teva, J. Verd, J. L. López, F. Torres, J. Esteve, G. Abadal, F. Pérez-Murano, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

16 Citations (Scopus)


The development of a novel fully integrated microelectromechanical system (MEMS) for RF purposes is presented. It is composed of a paddle polysilicon micro-resonator electrostatically excited and a capacitive CMOS read-out amplifier. The micro-resonator is fabricated directly on a commercial CMOS technology, only requiring a wet etching process for the release of the resonant structure after the full CMOS integration. Electrical characterisation of the on-chip resonant device has been performed showing a resonance frequency near 100 MHz.

Original languageEnglish
Pages (from-to)1327-1328
Number of pages2
JournalElectronics Letters
Issue number24
Publication statusPublished - 24 Nov 2005


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