Abstract
The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. © 2010 The Institution of Engineering and Technology.
Original language | English |
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Pages (from-to) | 640-641 |
Journal | Electronics Letters |
Volume | 46 |
DOIs | |
Publication status | Published - 1 Apr 2010 |