Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

J. Giner; A. Uranga; F. Torres; E. Marigó; N. Barniol

doi:https://doi.org/10.1049/el.2010.0505

Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

J. Giner, A. Uranga, F. Torres, E. Marigó, N. Barniol

Research output: Contribution to journal › Article › Research › peer-review

13 Citations (Scopus)

Abstract

The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. © 2010 The Institution of Engineering and Technology.

Original language	English
Pages (from-to)	640-641
Journal	Electronics Letters
Volume	46
DOIs	https://doi.org/10.1049/el.2010.0505
Publication status	Published - 1 Apr 2010

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title = "Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators",

abstract = "The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. {\textcopyright} 2010 The Institution of Engineering and Technology.",

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AU - Uranga, A.

AU - Torres, F.

AU - Marigó, E.

AU - Barniol, N.

PY - 2010/4/1

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N2 - The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. © 2010 The Institution of Engineering and Technology.

AB - The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. © 2010 The Institution of Engineering and Technology.

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DO - https://doi.org/10.1049/el.2010.0505

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EP - 641

JO - Electronics Letters

JF - Electronics Letters

SN - 0013-5194

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