Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

J. Giner, A. Uranga, F. Torres, E. Marigó, N. Barniol

Research output: Contribution to journalArticleResearchpeer-review

13 Citations (Scopus)

Abstract

The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5 frequency bandwidth in a tunable 26MHz bandpass filter with a very low bandpass distortion (less than 0.1dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM. © 2010 The Institution of Engineering and Technology.
Original languageEnglish
Pages (from-to)640-641
JournalElectronics Letters
Volume46
DOIs
Publication statusPublished - 1 Apr 2010

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