Full water integration of NEMS on CMOS by nanostencil lithography

J. Arcamone, M.A.F. Van de Boogaart, F. Serra-Graells, Francisco Torres Canals, Gabriel Abadal Berini, Nuria Barniol Beumala, Francesc Xavier Perez Murano

Research output: Contribution to journalArticleResearch

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-1
JournalTech. dig., Int. Electron Devices Meet.
Volume1
DOIs
Publication statusPublished - 1 Jan 2006

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