Full wafer size investigation of N\super+ and P\super+ co-implanted in 4H-SiC

S. Blanqué, J. Lyonnet, R. Pérez, D' altri, Jordi Pascual Gainza

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)698-704
JournalPhys. status solidi, A Appl. mater. sci. (Print)
Volume202
Issue number4
DOIs
Publication statusPublished - 1 Mar 2005

Cite this