Original language | English |
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Pages (from-to) | 698-704 |
Journal | Phys. status solidi, A Appl. mater. sci. (Print) |
Volume | 202 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1 Mar 2005 |
Full wafer size investigation of N\super+ and P\super+ co-implanted in 4H-SiC
S. Blanqué, J. Lyonnet, R. Pérez, D' altri, Jordi Pascual Gainza
Research output: Contribution to journal › Article › Research
1
Citation
(Scopus)