Full wafer integration of NEMS on CMOS by nanostencil lithography

Gabriel Abadal Berini, J. Arcamone, M. van den Boogaart, F. Serra-Graells, S. Hansen, J. Brugger, F. Torres, N. Barniol, F. Pérez-Murano

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationIEEE International electron devices meeting, 2006. IEDM'06
Place of PublicationSan Francisco (US)
Number of pages3
Publication statusPublished - 1 Jan 2006

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