From VHF to UHF CMOS-MEMS monolithically integrated resonators

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	21st IEEE international conference on micro electro mechanical systems. MEMS 2008 13-17 Jan.
Place of Publication	Tucson (US)
Pages	82-85
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2008

Cite this

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title = "From VHF to UHF CMOS-MEMS monolithically integrated resonators",

author = "J. Teva and G. Abadal and A. Uranga and J. Verd and F. Torres and J.Ll L{\'o}pez and J. Esteve and F. P{\'e}rez-Murano and N. Barniol",

year = "2008",

month = jan,

day = "1",

language = "English",

isbn = "978-1-4244-1792-6",

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booktitle = "21st IEEE international conference on micro electro mechanical systems. MEMS 2008 13-17 Jan.",

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TY - CHAP

T1 - From VHF to UHF CMOS-MEMS monolithically integrated resonators

AU - Teva, J.

AU - Abadal, G.

AU - Uranga, A.

AU - Verd, J.

AU - Torres, F.

AU - López, J.Ll

AU - Esteve, J.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2008/1/1

Y1 - 2008/1/1

M3 - Chapter

SN - 978-1-4244-1792-6

SP - 82

EP - 85

BT - 21st IEEE international conference on micro electro mechanical systems. MEMS 2008 13-17 Jan.

CY - Tucson (US)

ER -