Original language | English |
---|---|
Title of host publication | 21st IEEE international conference on micro electro mechanical systems. MEMS 2008 13-17 Jan. |
Place of Publication | Tucson (US) |
Pages | 82-85 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2008 |
From VHF to UHF CMOS-MEMS monolithically integrated resonators
J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol
Research output: Chapter in Book › Chapter › Research