From VHF to UHF CMOS-MEMS monolithically integrated resonators

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J.Ll López, J. Esteve, F. Pérez-Murano, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publication21st IEEE international conference on micro electro mechanical systems. MEMS 2008 13-17 Jan.
Place of PublicationTucson (US)
Number of pages3
Publication statusPublished - 1 Jan 2008

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