The objective of profilometry is to obtain the topography of a surface. Some methods are based on the measurement of the slope of the test surface. Then, by integration the profile of a surface can be determined. The slope is measured in a given set of points and from these data it is necessary to obtain the profile with the highest possible accuracy. Most frequently, the integration is carried out by numerical integration methods that assume different kinds of polynomial approximation of data between sampling points. We propose the integration of the function by means of processing in the Fourier domain. The analysis of the different integration methods in the Fourier domain enables us to easily study and compare their performance. © 2005 Society of Photo-Optical Instrumentation Engineers.
- Fourier transform
- Integration methods