Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology

G. Murillo, G. Abadal, F. Torres, J.Ll López, J. Giner, A. Uranga, N. Barniol, Organized by VDI/VDE - Gesellschaft (Editor), Sponsored by Elsevier (Editor)

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationProceedings:XXII Eurosensors, 7 10 September 2008, Dresden, Germany
Place of PublicationDüsseldorf (DE)
Number of pages41
Publication statusPublished - 1 Jan 2008

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