Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology

G. Murillo; G. Abadal; F. Torres; J.Ll López; J. Giner; A. Uranga; N. Barniol; Organized by VDI/VDE - Gesellschaft; Sponsored by Elsevier

Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology

G. Murillo, G. Abadal, F. Torres, J.Ll López, J. Giner, A. Uranga, N. Barniol, Organized by VDI/VDE - Gesellschaft (Editor), Sponsored by Elsevier (Editor)

Department of Electronic Engineering

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	Proceedings:XXII Eurosensors, 7 10 September 2008, Dresden, Germany
Place of Publication	Düsseldorf (DE)
Pages	1-42
Number of pages	41
Edition	1
Publication status	Published - 1 Jan 2008

Cite this

@inbook{c3c5d5dffe3c4505873e3f00e033f316,

title = "Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology",

author = "G. Murillo and G. Abadal and F. Torres and J.Ll L{\'o}pez and J. Giner and A. Uranga and N. Barniol and Gesellschaft, {Organized by VDI/VDE -} and Elsevier, {Sponsored by}",

year = "2008",

month = jan,

day = "1",

language = "English",

isbn = "978-3-00-025218-1",

pages = "1--42",

booktitle = "Proceedings:XXII Eurosensors, 7 10 September 2008, Dresden, Germany",

edition = "1",

}

TY - CHAP

T1 - Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology

AU - Murillo, G.

AU - Abadal, G.

AU - Torres, F.

AU - López, J.Ll

AU - Giner, J.

AU - Uranga, A.

AU - Barniol, N.

A2 - Gesellschaft, Organized by VDI/VDE -

A2 - Elsevier, Sponsored by

PY - 2008/1/1

Y1 - 2008/1/1

M3 - Chapter

SN - 978-3-00-025218-1

SP - 1

EP - 42

BT - Proceedings:XXII Eurosensors, 7 10 September 2008, Dresden, Germany

CY - Düsseldorf (DE)

ER -