Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications

M. Placidi, P. Godignon, N. Mestres, G. Abadal, G. Ferro, A. Leycuras, T. Chassagne

Research output: Contribution to journalArticleResearch

24 Citations (Scopus)
Original languageEnglish
Pages (from-to)276-280
JournalSensors and Actuators B: Chemical
Issue number1
Publication statusPublished - 1 Jul 2008

Cite this