Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications

M. Placidi, P. Godignon, N. Mestres, G. Abadal, G. Ferro, A. Leycuras, T. Chassagne

Research output: Contribution to journalArticleResearch

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)276-280
JournalSensors and Actuators B: Chemical
Volume133
Issue number1
DOIs
Publication statusPublished - 1 Jul 2008

Cite this

Placidi, M., Godignon, P., Mestres, N., Abadal, G., Ferro, G., Leycuras, A., & Chassagne, T. (2008). Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications. Sensors and Actuators B: Chemical, 133(1), 276-280. https://doi.org/10.1016/j.snb.2007.07.148