Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications

M. Placidi, P. Godignon, N. Mestres, G. Abadal, G. Ferro, A. Leycuras, T. Chassagne

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24 Citations (Scopus)

Original language	English
Pages (from-to)	276-280
Journal	Sensors and Actuators B: Chemical
Volume	133
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2007.07.148
Publication status	Published - 1 Jul 2008

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title = "Fabrication of monocrystalline 3C-SiC resonators for MHz frequency sensors applications",

author = "M. Placidi and P. Godignon and N. Mestres and G. Abadal and G. Ferro and A. Leycuras and T. Chassagne",

year = "2008",

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AU - Placidi, M.

AU - Godignon, P.

AU - Mestres, N.

AU - Abadal, G.

AU - Ferro, G.

AU - Leycuras, A.

AU - Chassagne, T.

PY - 2008/7/1

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DO - 10.1016/j.snb.2007.07.148

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VL - 133

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EP - 280

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1

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