Fabrication of MEMS resonators in the HF and VHF range on a 0.18um CMOS commercial technology

J.Ll López, G. Murillo, J. Giner, A. Uranga, G. Abadal, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	XXIII conference on design of circuits and integrated systems. DCIS 2008 Nov. 12-14
Place of Publication	Grenoble (FR)
Pages	60-65
Number of pages	5
Edition	1
Publication status	Published - 1 Jan 2008

Cite this

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title = "Fabrication of MEMS resonators in the HF and VHF range on a 0.18um CMOS commercial technology",

author = "J.Ll L{\'o}pez and G. Murillo and J. Giner and A. Uranga and G. Abadal and N. Barniol",

year = "2008",

month = jan,

day = "1",

language = "English",

isbn = "978-2-84813-124-5",

pages = "60--65",

booktitle = "XXIII conference on design of circuits and integrated systems. DCIS 2008 Nov. 12-14",

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TY - CHAP

T1 - Fabrication of MEMS resonators in the HF and VHF range on a 0.18um CMOS commercial technology

AU - López, J.Ll

AU - Murillo, G.

AU - Giner, J.

AU - Uranga, A.

AU - Abadal, G.

AU - Barniol, N.

PY - 2008/1/1

Y1 - 2008/1/1

M3 - Chapter

SN - 978-2-84813-124-5

SP - 60

EP - 65

BT - XXIII conference on design of circuits and integrated systems. DCIS 2008 Nov. 12-14

CY - Grenoble (FR)

ER -