Fabrication of MEMS resonators in the HF and VHF range on a 0.18um CMOS commercial technology

J.Ll López, G. Murillo, J. Giner, A. Uranga, G. Abadal, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationXXIII conference on design of circuits and integrated systems. DCIS 2008 Nov. 12-14
Place of PublicationGrenoble (FR)
Number of pages5
Publication statusPublished - 1 Jan 2008

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