Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

E. Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Pérez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, A. Boisen, N. Barniol

Research output: Contribution to journalArticleResearch

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)628-633
JournalNanotechnology (Bristol)
Publication statusPublished - 1 Jan 2004

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