Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

E. Forsén; S.G. Nilsson; P. Carlberg; G. Abadal; F. Pérez-Murano; J. Esteve; J. Montserrat; E. Figueras; F. Campabadal; J. Verd; L. Montelius; A. Boisen; N. Barniol

doi:10.1088/0957-4484/15/10/021

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

E. Forsén, S.G. Nilsson, P. Carlberg, G. Abadal, F. Pérez-Murano, J. Esteve, J. Montserrat, E. Figueras, F. Campabadal, J. Verd, L. Montelius, A. Boisen, N. Barniol

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23 Citations (Scopus)

Original language	English
Pages (from-to)	628-633
Journal	Nanotechnology (Bristol)
Volume	15
DOIs	https://doi.org/10.1088/0957-4484/15/10/021
Publication status	Published - 1 Jan 2004

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10.1088/0957-4484/15/10/021

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Forsén, E., Nilsson, S. G., Carlberg, P., Abadal, G., Pérez-Murano, F., Esteve, J., Montserrat, J., Figueras, E., Campabadal, F., Verd, J., Montelius, L., Boisen, A., & Barniol , N. (2004). Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist. Nanotechnology (Bristol), 15, 628-633. https://doi.org/10.1088/0957-4484/15/10/021

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Forsén, E, Nilsson, SG, Carlberg, P, Abadal, G, Pérez-Murano, F, Esteve, J, Montserrat, J, Figueras, E, Campabadal, F, Verd, J, Montelius, L, Boisen, A & Barniol , N 2004, 'Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist', Nanotechnology (Bristol), vol. 15, pp. 628-633. https://doi.org/10.1088/0957-4484/15/10/021

TY - JOUR

T1 - Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

AU - Forsén, E.

AU - Nilsson, S.G.

AU - Carlberg, P.

AU - Abadal, G.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Montserrat, J.

AU - Figueras, E.

AU - Campabadal, F.

AU - Verd, J.

AU - Montelius, L.

AU - Boisen, A.

AU - Barniol , N.

PY - 2004/1/1

Y1 - 2004/1/1

U2 - 10.1088/0957-4484/15/10/021

DO - 10.1088/0957-4484/15/10/021

M3 - Article

SN - 0957-4484

VL - 15

SP - 628

EP - 633

JO - Nanotechnology

JF - Nanotechnology

ER -