Fabrication and test of 3C-SiC electrostatic resonators

M. Placidi, P. Godignon, J. Esteve, N. Mestres, G. Abadal

Research output: Contribution to journalArticleResearch

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)949-952
JournalMaterials Science Forum
Volume556-557
DOIs
Publication statusPublished - 1 Sep 2007

Cite this