Fabrication and test of 3C-SiC electrostatic resonators

M. Placidi, P. Godignon, J. Esteve, N. Mestres, G. Abadal

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1 Citation (Scopus)

Original language	English
Pages (from-to)	949-952
Journal	Materials Science Forum
Volume	556-557
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.556-557.949
Publication status	Published - 1 Sep 2007

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title = "Fabrication and test of 3C-SiC electrostatic resonators",

author = "M. Placidi and P. Godignon and J. Esteve and N. Mestres and G. Abadal",

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T1 - Fabrication and test of 3C-SiC electrostatic resonators

AU - Placidi, M.

AU - Godignon, P.

AU - Esteve, J.

AU - Mestres, N.

AU - Abadal, G.

PY - 2007/9/1

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JO - Materials Science Forum

JF - Materials Science Forum

SN - 0255-5476

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