Fabrication and measurement of a suspended nanochannel microbridge resonator monolithically integrated with CMOS readout circuitry

Gabriel Vidal-Álvarez, Eloi Marigó, Francesc Torres, Núria Barniol

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)

Abstract

© 2016 by the authors. We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction.
Original languageEnglish
Article number40
JournalMicromachines
Volume7
DOIs
Publication statusPublished - 1 Mar 2016

Keywords

  • CMOS-NEMS
  • NEMS
  • Nanochannel
  • Resonators
  • Suspended channel

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