Abstract
© 2016 by the authors. We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction.
Original language | English |
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Article number | 40 |
Journal | Micromachines |
Volume | 7 |
DOIs | |
Publication status | Published - 1 Mar 2016 |
Keywords
- CMOS-NEMS
- NEMS
- Nanochannel
- Resonators
- Suspended channel