A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 1 Mar 2000|