Fabrication and characterization of nanoresonating devices for mass detection

Z. J. Davis, G. Abadal, O. Kuhn, O. Hansen, F. Grey, A. Boisen

    Research output: Contribution to journalArticleResearchpeer-review

    119 Citations (Scopus)

    Abstract

    A simple and flexible method for the fabrication of nanomechanical resonators is described. Direct laser writing on Al coated layered substrates yields a highly flexible mask definition technique and allows to realize nanometer-scale suspended cantilevers. The preliminary characterization results based on direct observation of the cantilever resonance are presented.
    Original languageEnglish
    Pages (from-to)612-616
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume18
    DOIs
    Publication statusPublished - 1 Mar 2000

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