Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

A. Uranga, J. Verd, E. Marigó, J. Giner, J. L. Muñoz-Gamarra, N. Barniol

Research output: Contribution to journalArticleResearch

39 Citations (Scopus)
Original languageEnglish
Pages (from-to)88-95
JournalSensors &actuators A: Physical
Volume197
Publication statusPublished - 1 Jan 2013

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