Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

Matteo Lorenzoni, Jordi Llobet, Federico Gramazio, Marc Sansa, Jordi Fraxedas, Francesc Perez-Murano

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    3 Citations (Scopus)

    Abstract

    © 2016 Author(s). In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.
    Original languageEnglish
    Article number06KK02
    JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
    Volume34
    Issue number6
    DOIs
    Publication statusPublished - 1 Nov 2016

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  • Cite this

    Lorenzoni, M., Llobet, J., Gramazio, F., Sansa, M., Fraxedas, J., & Perez-Murano, F. (2016). Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 34(6), [06KK02]. https://doi.org/10.1116/1.4967930