Enhancement of frequency stability using synchronization of a cantilever array for MEMS-based sensors

Francesc Torres*, Arantxa Uranga, Martí Riverola, Guillermo Sobreviela, Núria Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

8 Citations (Scopus)

Abstract

Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm).

Original languageEnglish
Article number1690
JournalSensors
Volume16
Issue number10
DOIs
Publication statusPublished - 13 Oct 2016

Keywords

  • Arrays
  • CMOS-MEMS
  • Cantilevers
  • Coupling
  • MEMS
  • Resonators
  • Synchronization

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