Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon

Ch Burrer, O. Ruiz, J. Samitier, S. Marco, J. R. Morante, J. Esteve

    Research output: Contribution to journalArticleResearch

    Original languageEnglish
    Pages (from-to)103-104
    JournalJournal of Micromechanics and Microengineering
    Volume6
    Issue number1
    Publication statusPublished - 1 Jan 1996

    Cite this

    Burrer, C., Ruiz, O., Samitier, J., Marco, S., Morante, J. R., & Esteve, J. (1996). Electrostatically controlled multi-purpose torsional structures obtained on monocrystalline silicon. Journal of Micromechanics and Microengineering, 6(1), 103-104.