Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications

M. Navarro, J.M. López-Villegas, J. Samitier, J.R. Morante, J. Bausells, A. Merlos

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	131-132
Journal	Journal of Micromechanics and Microengineering
Volume	7
Issue number	3
Publication status	Published - 1 Sep 1997

Cite this

@article{5bcb2c7048ab4274a3a36c2d48abb407,

title = "Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications",

author = "M. Navarro and J.M. L{\'o}pez-Villegas and J. Samitier and J.R. Morante and J. Bausells and A. Merlos",

year = "1997",

month = sep,

day = "1",

language = "English",

volume = "7",

pages = "131--132",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

number = "3",

}

TY - JOUR

T1 - Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications

AU - Navarro, M.

AU - López-Villegas, J.M.

AU - Samitier, J.

AU - Morante, J.R.

AU - Bausells, J.

AU - Merlos, A.

PY - 1997/9/1

Y1 - 1997/9/1

M3 - Article

VL - 7

SP - 131

EP - 132

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 3

ER -