Original language | English |
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Pages (from-to) | 131-132 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 7 |
Issue number | 3 |
Publication status | Published - 1 Sep 1997 |
Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications
M. Navarro, J.M. López-Villegas, J. Samitier, J.R. Morante, J. Bausells, A. Merlos
Research output: Contribution to journal › Article › Research
14
Citations
(Scopus)