Electrochemical Etching of Porous Silicon Sacrificial Layers for Micromachining Applications

M. Navarro, J.M. López-Villegas, J. Samitier, J.R. Morante, J. Bausells, A. Merlos

    Research output: Contribution to journalArticleResearch

    13 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)131-132
    JournalJournal of Micromechanics and Microengineering
    Volume7
    Issue number3
    Publication statusPublished - 1 Sep 1997

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